基于嵌入式碳纳米管的悬臂梁生物检测技术

Cantilever biosensing technology based on embedded carbon nanotube

随着先进微纳米加工技术的研究与应用,生物检测技术正朝着高精度、高特异性、无需标识、并行高速及低成本的方向发展。悬臂梁作为一种力学检测技术在生物检测领域有着广泛的应用。但是由于信号读取方式的限制,检测的灵敏度一直不尽人意。文中提出一种全新的基于嵌入式单壁碳纳米管的悬臂梁测试技术,将悬臂梁的应力传输系数GF值在仿真环境下由原来硅材料的200左右,提高至355。并且最后得出结论,需要提高检测灵敏度,应该尽量减小碳纳米管的尺寸。

With the developmentof the NEMS fabrication technology,cantilever now sees more and more application in the field of biosensing.However,the traditional read-out methods put limit on this technology.Optical read-out method is hard to put into integration and the resolution of piezoresistance read-out method is far from satisfactory in many applications.In order to solve this problem,this thesis brings up a method of embedding a single-walled carbon nanotube on the surface of cantilever serving as stress transducer to raise resolution.In simulation environment,the GF is rasied up to 355 from traditional 200 in silicon,drawing the conclusion that the device demension is reduced as much as possible to enhance resolution.