非球面长圆状反射镜支撑结构的工程分析

Analysis of Support Structure for the Length and Round Mirror

针对非球面长圆状反射镜的支撑结构初步设计方案，采用有限元法进行了静力学分析和计算。以镜面面型精度为评价指标，对支撑结构进行了有效的改进，并最终确定了满足要求的支撑结构方案。

The scheme of length and round mirror & its basic support structure is introduced . The static analysis of mirror with support structure was made by means of FEM , The mirror is improved & its structure is selected to meet the WFE specification.