模块化设计在半导体湿法清洗设备中的应用

The Application of Modular Design in Semiconductor Wet Cleaning Equipment

论述了半导体湿法清洗设备的特点及模块化设计方法在半导体湿法清洗设备中的应用方式,阐明了模块化设计方法在半导体湿法清洗设备中应用的特点及注意事项。

This paper discusses the characteristics of the semiconductor wet cleaning equipment and the application methods of modular design in semiconductor wet cleaning equipment,expounds the characteristics and the matters needing attention on the application of modular design methods in semiconductor wet cleaning equipment