Investigation of flexible electrodes modified by TiN,Pt black and IrO_x

TiN, platinum （Pt） black and iridium oxide are introduced to the stimulating sites to improve the performance of the flexible electrode. Low temperature process is used to fabricate the modifying films. TiN is coated on the gold sites by magnetron sputtering while platinum black and iridium oxide are coated by electroplating and electrodeposifion, respectively. The impedance of the electrode decreases dramatically after modification. The combined analysis of surface morphology and cyclic voltammograms （CV） in phosphate buffer saline （PBS） solution indicates that the modified electrode sites have larger electrode-electrolyte capacitance and smaller faradic resistance than unmodified sites, thus they have smaller electrochemical impedances.