氧浓度和衬底温度对透明导电Cd_2SnO_4薄膜光学性质的影响

Effect of O_2 Concentration and Substrate Temperature on the Optical Properties of Transparent Conductive Cd 2SnO 4 Thin Films

采用射频溅射方法在Ａｒ＋ Ｏ２ 气氛中制备了Ｃｄ２ＳｎＯ４（ＣＴＯ）透明导电薄膜，报道了在不同氧浓度和衬底温度下该膜的透射率、消光系数和折射率随波长变化的情况。研究发现：氧浓度越高，衬底温度越高，则薄膜透射率、折射率越大，而消光系数越低。对这些结果，从ＣＴＯ膜的晶格常数、氧空位等角度进行了理论分析。

In this paper, we report the optical properties of transparent conductive cadmium stannate (Cd 2SnO 4)thin films prepared by reactive sputtering in Ar+O 2 atmosphere as a function of wavelength, including the discussing of optical transmittance T, extinction coefficient k and refractive index n. Experimental results indicated that the transmittance T and refractive index n of CTO films are increased with the increasing of oxygen concentration and substrate temperature, while the extinction coefficient k is decreased. The experimental results are also discussed with the theories of crystal struture and the variation of the defect concentration.