超光滑基片表面均方根粗糙度的测量

Measurement of Root Mean Square Roughness of Supersmooth Base Flat Surface

探讨根据测量的总积分散射定标得到表面均方根粗糙度的问题。利用基片的表面模型和积分球本身的结构特征，对测量的表面有效均方根粗糙度进行修正，得到的表面均方根粗糙度与进口表面测量仪测量得的值相差为０．１ｎｍ 左右。

In this paper,The question that the RMS roughness is gotten from the measured TIS datum is discussed emphatically.Making use of the surface model of the base flat and the structure character of the integrated sphere,The measured RMS roughness are modified.As a result,the RMS roughness that has been gotten here is correspondent with those gotten from WYKO which is imported from America by Changchum Optical and Mechanical research institute.And the distance between them is about 0.1nm.