亚微米电子束曝光机激光工件台位置显示系统

Position display system for laser stage of sub micron E beam exposure machine

介绍了工件台位置显示系统的组成、工作原理及软件设计。由于采用单片机控制技术，从而保证了系统的显示精度和运行可靠性。

The composition, operational principle and software design of position display system for stage is introduced. Due to applying single chip computer control technique display precision and operation reliability can be ensured.