摘要
提供了一种用等离子体聚合制备金属－ 有机化合物ＣｕＡＡ 薄膜的实验研究。指出ＣｕＡＡ薄膜随工艺条件的不同可呈现出不同的颜色和电性能，尤其是其电阻率变化范围可达６ － ７ 个数量级。对所制备的ＣｕＡＡ薄膜进行了红外光谱分析和扫描电镜分析。
Thin film of metal organic polymer copper acetylacetonate (CuAA) were prepared by means of glow discharge plasma polymerization. The obtained film showed a variety of colors and different electrical properties depending on the plasma conditions. The film resistivity changes from 10Ω cm to 10 6Ω cm The film structure was investigated using IR spectra and SEM.
出处
《微细加工技术》
1999年第4期28-32,共5页
Microfabrication Technology
