摘要
介绍一种用于半导体工业领域测量膜厚和表面轮廓的传感器，其分辨率达１ｎｍ 。经计量部门测试，测量范围为±１８０μｍ 时，线性度达０－４ ％ ＦＳ；量程分为四档：量程为１００ｎｍ 时，重复误差为２ ％ 。量程为５００ｎｍ 或１０００ｎｍ 时，重复误差为１％ 。量程为５０００ｎｍ 以上时，重复误差为零。传感器触针对工件的压力在０ ～０－５ｍＮ 间可调。
This paper introduces a transducer,which is used for measuring thickness of coated film and surface profile of silicon wafer.The resolution of the transducer is 1nm Having been qualified by authority,the measuring ranage is ±180μm With its linearity better than 0.4%F.S.The repeatability is 2% as the measuring range is 100nm,1% as the 500nm or 1000nm,and the repetitive error is zero as the measuring range is larger than 5000nm.The contact force can be adjusted between zero to 0.5mN.
出处
《微细加工技术》
1999年第4期56-61,共6页
Microfabrication Technology
关键词
传感器
纳米级
表面轮廓
transducer
resolution of nm order
surface profile
