摘要
根据微细加工设备的维修实践，论述了微细加工设备维修工程管理的主要内容；阐述了维修工程的主要度量指标及柏拉图在维修工程中的应用；提出了故障模式。
In accordance with the practice of main tenance engineering. The main contents of the maintenance management for microfabrication of equipments are discussed.The main mensural indexes and PARETO diagrams in application of the maintenance engineering are explained. the fault models the fault analysis methods and three dimensional effects diagram of maintenance engineering are also given.
出处
《微细加工技术》
1999年第4期70-76,共7页
Microfabrication Technology
关键词
微细加工设备
故障
维修
microfabrication equipments
fault
maintenance
preventive maintenance
