一种小型微位移超稳定直线压电驱动器

A Linear Piezoelectric Mini-actuator with High Resolutionand Stability

研制出一种新型直线蠕动式压电驱动器，它具有小体积、低摩擦、低噪声、稳定性好、分辨率高等特点。该装置体积仅为４０ｍｍ×３５ｍｍ×２５ｍｍ，可用于机器人、微细加工、仪器仪表、精密机械等领域。

A new type of linear inchworm piezoelectric actuator is proposed.It combines thefeatures such as pocket-size, low-friction, low-noise, high-stability, high-resolution, etc.The dimention of the actuator is 40 mm×35 mm×25 mm.It may be applied to robot,micromachining,instrument,and precision machinings,etc.