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新型光学谐振腔甲烷传感器的研究

Study of new type optical resonator cavity methane gas sensor
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摘要 基于甲烷气体光谱吸收的原理,设计了一种高精度双波长单光路检测甲烷气体体积分数的检测系统,该系统用多次再入射光学谐振腔作为甲烷气体吸收腔,入射光线在气体吸收腔内的多次反射增加了与甲烷气体发生吸收作用的光程长度,极大地提高了检测精度,而且由于光点的分散分布特性,使该系统又具有很好的散热性,不会引起热量的累积,有利于甲烷气体吸收腔的散热,经实验验证,该系统具有极高的精度和可靠性,为设计高精度甲烷传感器提供了新的途径。 Based on the principle of methane gas spectral absorption,a high-precision dual wave-length single optical path detection system for methane gas volume fraction,which use multiple re-incidence optical resonant cavity as methane gas absorption chamber is designed.Multiple reflections of light rays in the gas absorbing chamber increase optical path length of the absorption with methane gas,which greatly improves the detection precision,and because the distribution characteristics of scattered light points,so that the system also has a good characteristics of loose heat,which does not cause heat accumulation.It is benefit to the heat elimination of methane gas absorption chamber.It is verified by experiment,the system has very high precision and reliability.It provides a new way for the design of high precision methane sensors.
作者 付华 李根
出处 《传感器与微系统》 CSCD 北大核心 2011年第8期86-88,共3页 Transducer and Microsystem Technologies
基金 国家自然科学基金资助项目(50874059) 教育部博士点基金资助项目(200801470003)
关键词 甲烷 光学谐振腔 光程长度 散热 双波长单光路 methane optical resonant cavity optical path length heat dissipation dual-wavelength single optical path
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