SnO_2/ZnO及ZnO/SnO_2双层膜的气敏性质

The Air sensitivity of SnO_2/ZnO and ZnO/SnO_2 Bilayer Thin Films

采用动态脉冲法研究了ＳｎＯ２／ＺｎＯ及ＺｎＯ／ＳｎＯ２ 双层膜的气敏性质。结果表明：选择合适的膜厚及膜厚比，可获得灵敏度及选择性良好的气敏元件。讨论了一些影响双层膜气敏性质的因素，结合元素的扩散，初步解释了膜厚与灵敏度的关系。

An investigation on air sensitivity of SnO 2/ZnO and ZnO/SnO 2 bilayer is carried out by dynamic pulse.It proves that the air sensitivity unit with high sensitivity and broad adaptation quality can be obtained.The paper also discusses the factors that affect the quality of air sensitivity of bilayer films and spreading of combining elments,and gives a rough explanation of the relationship between the thickness of film and its sensitivity.