多层膜劳厄透镜对8keV X射线的聚焦性能模拟研究

Simulation on Focusing Performance of X-Ray Multilayer Laue Lens for 8 keV X-Ray

基于多层膜技术的劳厄(Laue)透镜能实现硬X射线纳米级聚焦,在X射线微纳分析领域具有重要的应用前景。基于衍射动力学理论,分析了X射线在多层膜劳厄透镜中的传播,计算了不同结构的多层膜劳厄透镜对8keVX射线的聚焦性能。结果表明,最外层厚度为5nm的倾斜多层膜劳厄透镜可获得5.7nm的聚焦光斑和26%的平均衍射效率。

A nanometer-scale focused spot of hard X-ray can be achieved by multilayer Laue lenses （MLLs）. X-ray propagation in MLL is analyzed using dynamical diffraction theory. The focusing performance of tilted MLL is calculated for 8 keV X-ray. The results show that a focused beam size of 5.7 nm and a mean efficiency of 26% can be obtained by a tilted MLL with an outmost zone thickness of 5 nm. MLL is proved theoretically to be an effective method to focus X-ray beam.