多层陶瓷电容器BaNd_2Ti_4O_(12)的化学腐蚀研究

Study on Chemical Corrosion of BaNd_2Ti_4O_(12) Multi-Layer Ceramic Capacitors

以混合酸作为腐蚀液,研究了BaNd2Ti4O12多层陶瓷电容器的化学腐蚀的工艺条件。提高酸的浓度、时间和温度,都会加快腐蚀,其中温度的影响最大。硝酸替代氢氟酸,无法将BaNd2Ti4O12样品的晶界腐蚀出来。适宜的腐蚀条件为:40%氢氟酸3 mL、浓盐酸12 mL配制成100 mL溶液,加热温度60℃,时间30 s。

The chemical corrosion of BaNd2 Ti4O12 multi-layer ceramic capacitors （MLCC） in the mixture of acid solution were investigated. The corrosion of ceramic was accelerated with increasing the concentration and/or high temperature of the acid solution as wellas the corrosion time. The solution temperature showed more effective than other two factors. The BaNd2 Ti4O12 intercrystalline could not be etched as the HF was used instead of HNO3 in acid mixture. The optimized corrosion condition was as fellows： The 100 mL chemical solution composed of B mL HF （40%） and 12 ml. HCl,and the ceramic sample was dipped in the 60℃ solution for 30 s.