4Mai Y, Klein S, Carius R, et al. Open Circuit Voltage Improvement of High Deposition Rate Microcrystalline Silicon Solar Cells by Hot Wire Interface Layers [ J ]. Appl Phys Lett, 2005, 87: 073 503.
5Rath J K, Rubinelli F A, Schropp R E I. Proceedings of 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion[C], Vienna: [s.n. ], 1998: 812.
6Sobajima Y. Solar Cell of 6.3% Efficiency Employing High Deposition Rate (8 nm/s) Microcrystalline Silicon Photovoltaic Layer [J]. Sol Energy MaterSol Cells, 2009, 93:980-983.
7http: //www. uni-solar, com/.
8LiangZongcuo(梁宗存).Polycrystalline Silicon Film Solar Cells on Granular Silicon Tape Substrate(颗粒硅带衬底上多晶硅薄膜太阳电池)[D],Quangzhou:Zhongshan Vniversity,2004.
9BanQun(班群).Key Technology of Polysilicon Thin Film Solar Cells on Low Cost Granular Silicon Tape (低成本颗粒硅带上多晶硅薄膜太阳电池关键技术)[D],Quangzhou:Zhongshan University,2006.
10Kluth O. Texture Etched ZnO: A1 Coated Glass Substrates for Silicon Based Thin Film Solar Cells [ J ]. Thin Solid Films, 1999, 351:247-253.