超精密机床位置伺服控制器的研究

Design of the Position Servo Controller for the Ultra Precision Lathe

介绍了自行研制的HCM－l超精密机床位置伺服控制器的硬件结构和何服控制策略。其中，硬件方面采用了基于PC总线的开放式的体系结构；伺服控制方面，则在双轴同步控制的基础上，采用了由单频激光干涉仪和高精度光电码盘构成的双反馈复合控制算法，可实现半闭环和全闭环控制。实验结果表明，使用本位置伺服控制器的超精密机床的轮廓跟踪精度可达0．5μm。

The hardware structure and the control strategy ofthe position servo control system of the HCM-l ultra preci-sion diamond lathe designed by ourselves are presented. Thesrevo controller is an open structure system based on PCbus. It used the bi-axial synchronizing control strategy incontour controlling, and uses bi-feedback compleX coned al-gorithm, in which the actual position informainn was feed-back through both laser interferometer and high precision en-coder- This system can switched between half- closed-loopand closed-loop mode - Experiment result shows that the con-tour tracking accuracy is as high as 0. 5μm.