硅微加速度计多孔方板阻尼特性的数值分析

Numerical Analysis on Multi-hole Rectangle Structure of Si Capacitor Microaccelerometer

本文根据电容式微加速度计阻尼特性数学模型，完成了实践中常用的多孔方板结构电容式微加速度计阻尼特性的数值分析．比较了多孔方板结构阻尼特性数值分析结果。讨论了多孔方板结构参数对阻尼特性的影响，分析了多孔方板结构的“扰流”特性，并界定了具有物理一致性单元的结构参数范围．为多孔方板结构阻尼特性经验公式的提取作了准备，也为设计电容式微加速度计和优化其性能提供了帮助。

In this paper, we have performed a numerical analysis on multi-hole rectangle structure of Si capacitor microaccelerometer base on its numerical model. Based on the comparison of the analysis results, we discussed how the structure influences the damping characteristics of the whole system, and analyzed the turbulence of this kind of structure. We identified the structure value when we can get physical similar cells from the whole sensor mass. All these work help us get the formula of damping characteristics of,multi-hole rectangle structure, also help us design the capacitor microaccelerometer and optimize its performance.