摘要
研究了PMMA膜的成膜方法、成膜特性以及作为气敏材料的应用。实验结果表明,PMMA的表面粗糙度与转速密切相关,转速越大,表面粗糙度越小。PMMA的膜厚符合液体动力学方程,旋涂速度越大,膜厚越薄。当旋涂速度为6000rpm时,可得到厚度为42nm的PMMA膜,完全符合气敏材料对膜厚的要求。
Polymethyl methacrylate(PMMA) film used as sensing material was prepared,and its properties were studied.Experiment result indicated that the surface roughness is determined by the coating speed: the faster the speed,the small the RMS.The thickness of PMMA film was approved to submit to kinetics equation of liquid:the faster the speed,the thinner the PMMA film.A PMMA film with its thickness of 42 nm was obtained at a coating speed of 6000rpm,meeting the specification of vapor sensing film.
出处
《安徽化工》
CAS
2011年第4期49-51,共3页
Anhui Chemical Industry
关键词
聚甲基丙烯酸甲酯
表面粗糙度
膜厚
气敏材料
polymethyl methacrylate
surface roughness
film thickness
sensing material