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PMMA成膜特性的研究 被引量:1

Study on Properties of PMMA Film
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摘要 研究了PMMA膜的成膜方法、成膜特性以及作为气敏材料的应用。实验结果表明,PMMA的表面粗糙度与转速密切相关,转速越大,表面粗糙度越小。PMMA的膜厚符合液体动力学方程,旋涂速度越大,膜厚越薄。当旋涂速度为6000rpm时,可得到厚度为42nm的PMMA膜,完全符合气敏材料对膜厚的要求。 Polymethyl methacrylate(PMMA) film used as sensing material was prepared,and its properties were studied.Experiment result indicated that the surface roughness is determined by the coating speed: the faster the speed,the small the RMS.The thickness of PMMA film was approved to submit to kinetics equation of liquid:the faster the speed,the thinner the PMMA film.A PMMA film with its thickness of 42 nm was obtained at a coating speed of 6000rpm,meeting the specification of vapor sensing film.
出处 《安徽化工》 CAS 2011年第4期49-51,共3页 Anhui Chemical Industry
关键词 聚甲基丙烯酸甲酯 表面粗糙度 膜厚 气敏材料 polymethyl methacrylate surface roughness film thickness sensing material
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  • 1IHS Displaybank."偏光片及偏光片辅材产业动向分析"报告[R].2012.
  • 2中国专利数据库:http//www.pss-system.gov.cn/.
  • 3IHS Displaybank."偏光片及偏光片辅材产业动向分析"报告.

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