晶花传感器及其在大力值测量中的应用

The Crystal Flower Transducer and Its Application to a Large Force Measurement

重点论述了一种新型传感器芯片 晶花芯片及由其构成的晶花传感器，探讨了从选晶、切割、非圆晶片、晶轴取向、晶花布阵、绝缘到布线等一系列问题，阐明转换基理和工艺过程，并给出几种典型芯片模式，以及它在大力值测量中的应用。

The paper discusses a new type of chip used in a transducer, namely, a kind of crystal flower chip, including its componment of the crystal flower transducer. Besides, a series of problems are studied, such as the crystals selection, guart crystal cutting, non round crystal, direction of crystal axis, crystal flowers arrangement, insulation and wiring. Herefore, the transforming principle and the technical process are also expounded, with several typical chip models of crystal flowers as well as their application to the measurement of large force proposed.