远紫外及真空紫外反射率测量的研究

A study of reflectivity-measurement in far ultraviolet and vacuum ultraviolet

本文报道了一种采用成象式折叠腔测量真空紫外区域绝对反射率的方法,测量准确度为±5×10^(-3),精密度为±5×10^(-4).

A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.