合成氯硅烷精馏工艺改造

Modification of distillation process for synthesis of chlorosilanes

针对多晶硅生产中合成氯硅烷精馏工艺存在的问题,对其工艺进行了改造,采用Aspen Plus软件对改造后的工艺进行了模拟计算,并结合生产实际确定了较优的操作条件。与原工艺相比,工艺流程简单,设备数量减少,塔釜再沸器能耗减少23.56%,塔顶冷凝器能耗减少24.68%,合成精制三氯氢硅及多晶硅产品的合格率分别由改造前的92.1%和86.4%提高至97.5%和92.1%。

To solve the problem existing in the distillation process of synthesis of chlorosilanes for polysilicon production, the original process is modified. The optimal operating parameters of the modified process are obtained by simulation and calculation of the new process with Aspen Plus software, in combination with the practical production. Comparing with the original process, the new process is simplified. The quantity of the equipment is reduced. Refrigeration duty of condenser is saved 23.56%. Heat duty of reboiler is saved 24. 68%. The qualified productivity of refined trichlorosilane and polysilicon increase from 92. 1% and 86.4% tO 97. 5% and 92. 1% ,respectively.