探测器扫描法测量激光二极管的远场三维分布

Detector scanning testing for Far-field three-dimensional distribution of laser diodes

改进了探测器扫描法测试半导体激光二极管(1D)光束发散角,采用"逐角扫描组合"结合计算机模拟处理的方式,不仅可以得到LD长短轴方向的光强分布,也可以得到空间光强分布。克服了面阵CCD测量法存在测量成本高、测试速度慢等问题。定量讨论了扫描法与CCD测量法之间的偏差,结果表明对于发散角较大的垂直发散角θ┸上,扫描测试结果需要校正。

Improved detector scanning testing beam divergence angle of laser diodes（LDs）,the＂angle by angle scanning＂and the computer simulation processing can not only obtain light intensity distribution of LDs main axis,can also get space laser intensity distribution,and the high cost,testing slow by the surface CCD testing have been overcome.Quantitatively discussed the deviations between the CCD method and scanning method,and the results showed that the larger the divergence angle of the vertical θ┸scanning the test results need correction.