微压力传感器参数设计及灵敏度分析

Parameter Design and Analysis of Sensitivity Micro-Pressure Sensor

对传感器的灵敏度理论进行了详细分析,得到了传感器的灵敏度与应力和应变的关系。通过有限元仿真软件对传感器的灵敏度和线性度进行了研究,分析了膜片的厚度、岛的高度和梁膜片的长度对传感器性能的影响,为传感器芯片的设计提供了重要的依据。

Sensitivity theoretical analysis of sensor was carried out in detail.The relationship between sensitivity and stress and strain was presented.The sensitivity and linearity of sensor were researched.The thickness of diaphragm,the altitude of the island and length of the beam diaphragm were studied in order to explore the influence on the performance of the sensor.It provides important scientific basis for sensor chip design.