高功率准分子激光系统光学设计

Optical design of high power excimer laser system

回顾并介绍了高功率准分子激光系统设计中需要综合考虑的两项主要技术——像传递技术和角多路技术。讨论了照明方式和激光振荡源的光束整形在激光系统成像光路设计中的重要作用,对多路放大技术及角多路放大技术形式进行了系统分析。多路激光非相干合束是角多路技术和成像技术对高功率准分子激光系统光学设计提出的特殊要求,在简要分析了透射阵列和反射式望远物镜两种实现多路激光合束的打靶光学系统基础上,提出了一种利用反射式打靶光学系统和一套光学延迟线阵列来同时实现角多路编码和解码的新型光路布局,给出了初步设计方案。

Image relay and angular multiplexing,which should be considered together in the design of high power excimer laser system,is reviewed.It＇s important to select proper illumination setup and laser beam shaping techniques.Given the complex and special angular multiplexing scheme in high power excimer laser systems,some detailed conceptual layout schemes are given in the paper.After a brief description of lens array and reflective telescope objective,which combine the incoming beams to a common focus,a new schematic layout which uses the final targeting optics and one optical delay line array,to realize multiplexing and de-multiplexing simultaneously is first proposed in the paper.