面向SWCNT-FET制造的介电泳装配技术

Assembly of Single-Walled Carbon Nanotube Field-Effect Transistor Using Dielectrophoresis

针对单壁碳纳米管(SWCNT)场效应晶体管(FET)制造过程中面临的SWCNT装配问题,采用介电泳技术实现SWCNT在微电极上的有效装配.对SWCNT在非均匀电场中所受到的介电泳力进行了相关理论分析,利用COMSOL多物理场耦合软件模拟了介电泳驱动电场,并做了大量装配实验,获得了高效装配SWCNT所需的实验参数.AFM扫描观测及电特性测试验证了这种方法的有效性,同时也为其他一维纳米材料纳电子器件的装配制造提供了借鉴.

With respect to the assembly of carbon nanotube field-effect transistors,the dielectrophoresis technology was used to assemble single-walled carbon nanotubes（SWCNTs） between micro-electrodes.The dielectrophoretic force driving SWCNTs in a non-uniform electric field was analyzed theoretically.The driving electric field of dielectrophoresis was simulated by the COMSOL software.A number of experiments were carried out,with the required experimental parameters for efficient assembling of SWCNTs obtained.AFM scanning and electrical properties of SWCNTs showed that the method can achieve the effective assembly of carbon nanotube field-effect transistors,and that it is also an effective method of assembly and manufacture for other one-dimensional nanomaterials assembly of nanoelectronic devices.