Ronchi光栅光密度的一种测试方法

Real-time non-destructive testing of Ronchi grating

本文提出利用衍射光栅的反射特性,在自光图像处理系统中对光栅进行实时无损伤检验.这种方法灵敏度高、简便易行,有较高的实用价值.理论与实验结果一致.

In this paper, a real-time non-destructive method is proposed for testing grating quality in the shite light processing system by using the reflective property of grating. This technique gives a high accuracy and it is easy to operate, so it has practical value in production. The theory analysis and experimental results are consistent very well.