摘要
本文提出利用衍射光栅的反射特性,在自光图像处理系统中对光栅进行实时无损伤检验.这种方法灵敏度高、简便易行,有较高的实用价值.理论与实验结果一致.
In this paper, a real-time non-destructive method is proposed for testing grating quality in the shite light processing system by using the reflective property of grating. This technique gives a high accuracy and it is easy to operate, so it has practical value in production. The theory analysis and experimental results are consistent very well.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1989年第10期921-924,共4页
Acta Optica Sinica
关键词
光栅质量
无损伤检验
光栅
grating quality
non-destruotive testing.