摘要
介绍了基于梳状、梁式、圆盘三种结构的射频微机电系统(RF-MEMS)谐振器及滤波器,并对RF-MEMS谐振器及滤波器的结构与性能参数进行讨论;分析RF-MEMS谐振器及滤波器设计和制造中的有关问题及其处理方法;RF-MEMS谐振器及滤波器性能优异,能与其他器件实现片上集成,且与集成电路工艺兼容,在射频无线通信系统中的应用有着良好前景。
RF-MEMS resonators and filters which based on the comb, beam and disk structures are introduced. The parameters of structure and performance of several RF-MEMS resonators and filters are discussed. The related problems and its handling techniques of RF-MEMS resonators and filters in the design and manufacture process are analyzed. RF-MEMS resonators and filters have excellent performance, can be integrated with other circuit components on a chip, and be compatible with integrated circuit process, would be used in the radio frequency communication systems.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2011年第9期76-81,共6页
Electronic Components And Materials
基金
重庆市自然科学基金资助项目(No.CSTC2010BB2414)
关键词
射频微机电系统
微机械谐振器
综述
微机械滤波器
RF-MEMS
micro-electro-mechanical resonators
review
micro-electro-mechanical filters
