阻尼比对微电子厂房微振动响应的影响研究

Study on the effect of damping ratio on the microvibration response of micro-electronics plant

采用有限元分析软件SAP2000,对某微电子厂房光刻区工作平台结构进行建模分析,通过对基底输入实测微振数据,计算平台的结构微振动响应,得出工作平台上一些典型点在不同阻尼比时的加速度、速度和位移反应谱曲线以及时程曲线。分析结果表明,结构在不同方向具有不同的阻尼比,且阻尼比与微振动响应的反应谱峰值之间的关系可用二次曲线来拟合。

This paper simulated the structural microvibration response of the work platform structure of the optical lithography zone in a micro-electronics plant by using the finite element analysis software SAP2000.With the field-measured data of microvibration inputted at the base of the work platform structure to analyze its vibration response,the paper obtained the acceleration time-history curves,the response spectra at three directions with different damping ratios.The results indicate that there are different damping ratios at different directions;and microvibration response at each direction can be approximated as a quadratic curve of damping ratio.