480kg铸锭工艺的研究

The study of 480kg ingot process

目前GT铸锭炉使用的是878mm×878mm×420mm坩埚和450kg的铸锭工艺。在装料的质量上由于坩埚尺寸原因而受到限制,同时由于铸锭工艺的原因导致生产出来的晶锭晶粒偏小,进而影响多晶硅片的转换效率。本文论述了通过采用定制的加高坩埚和全新的铸锭工艺来生产480kg晶锭,不仅增加了硅料的投炉质量,而且增大了晶锭中晶粒的尺寸,提高了多晶硅片的转换效率。通过对480kg与450kg铸锭工艺生产的晶锭数据进行对比后发现,前者的铸锭工艺要明显优于后者。

GT ingot furnaces currently use 878mm × 878 mm× 420mm crucible and the 450kg ingot process. The weight of casting silicon is limited the reason for crucible size, and because the ingot process causes the grain produced in the ingot small, thereby affecting the conversion efficiency of polycrystalline silicon films.This article discusses the use of heightened crucible and a new ingot process to produce 480kg ingot. This process does not only increase the weight of casting silicon, and increases grain size in ingot and improves the conversion efficiency of polycrystalline silicon films. It finds by comparing the data which product ingot with 480kg and 450kg ingot process that the former is much better than the latter ingot process.