摘要
不同的投影物镜安装方式对应不同的隔振方式,不同的隔振方式对投影光刻系统的图形传递能力也有较大影响。对两种主要的光刻投影物镜安装方式进行了研究,并对各自特点进行了讨论。
Different installation method of projection lens corresponds to different method of vibration isolation,different isolation method of lithography projection system affects transfer ability of the graphics.Two main installation methods of lithography projection lens were studied in this paper,and their characteristics were discussed.
出处
《光机电信息》
2011年第8期22-26,共5页
OME Information
关键词
投影物镜
安装方式
隔振方式
投影光刻系统
projection lens
installation methods
method of vibration isolation
lithography projection system
