摘要
精密气动定位系统具有高精度、高速、大行程、传动平稳、使用费用低等优点,目前广泛地应用于光刻、数控机床等诸多精密工程领域。本文按照时间顺序介绍了精密气动定位系统的发展情况,总结了精密气动定位系统的应用特点,并指出当前精密气动定位系统一些有待改进的关键技术。
High-performance pneumatic positioning system has such advantages as high-precision,high speed,large stroke,smooth transmition,cost-effectiveness and so on,and it is widely applied to precision engineering such as photolithography,CNC,etc at present.The progress of high-performance pneumatic positioning system was described in chronological order,the applications and key technologies were summarized.
出处
《光机电信息》
2011年第8期37-44,共8页
OME Information
基金
国家02专项基金(2009ZX02005)资助
关键词
气动
精密定位
非线性
气驱动器
pneumatic
high-precision positioning
nonlinearity
pneumatic actuators
