基于SOI非对称马赫曾德尔结构的集成矢量和微波光子移相器(英文)

Integrated vector sum microwave photonic phase shifter based on asymmetric Mach-Zendner structure in SOI

设计和分析了一种基于SOI(绝缘体上的硅)脊型波导非对称马赫曾德尔结构的集成矢量和微波光子移相器。对于10 GHz的微波信号,设定非对称两臂的长度差为3 983μm时,其相应的时间延迟约为47 ps。分别在两臂上集成了一个热光可调谐可变光衰减器用于光学调谐,当衰减单元的折射率在0～6×10-3变化时,实现了10 GHz微波信号在0～180°的相位调谐。该器件尺寸小、结构紧凑,易于实现片上集成,在光控相控阵雷达中很有应用前景。

An integrated vector sum microwave photonic phase shifter（MWPPS） based on the asymmetric Mach-Zendner structure in Silicon on Insulator（SOI） rib waveguides was designed and fabricated for the first time.A fixed true time delay of 47 ps was achieved by a length difference of 3 983 μm between the two asymmetric arms.Then two thermo-optical Variable Optical Attenuators（VOAs） were integrated in the two arms respectively to tune the optical power individually.The phase shift ranging from 0° to near 180° for a 10 GHz microwave signal has been achieved by the RI variation of 06×10-3 in VOAs.The device which has a very compact size could be easily integrated in silicon optoelectronic chips and expected to be widely used in Optically Controlled Phased Array Radars（OCPARs）.