一种双腔体二甲基硅氧烷液体变焦透镜

Tunable liquid lens with double PDMS cavities produced by diamond turning and soft lithography

针对PDMS(二甲基硅氧烷)液体变焦透镜在使用过程中常会发生边缘脱落从而影响透镜性能甚至毁坏整个器件的问题,提出了一种基于单点金刚石切削和软刻蚀工艺的双腔体可调焦透镜模型,该模型相比仅由单PDMS腔体和PDMS薄膜粘合的结构,能有效防止在大变形条件下变形膜边缘脱落,从而更大可能地保证透镜正常工作.测试结果表明:相比于单腔体的模型,该透镜在保留可调焦透镜性能的同时,具有更好的工作稳定性.

In conventional PDMS（polydimethylsiloxane） tunable liquid lens,the edge of the deformed membrane often falls off the cavity.Thus,an improved model for tunable liquid lens with double cavities was proposed.A convenient and low-cost process was used to fabricate the lens that combined single-point diamond turning（SPDT） with soft lithography using PDMS.Compared with the normal structures,the new one with double cavities reserve the tunable focus function,and can promise a safer bonding between the lens cavity and the PDMS membrane.Experimental results demonstrate that the lens proposed is more stable than the normal single cavity liquid lens.