摘要
本文叙述了多功能光栅测长仪光栅尺的光刻工艺,文中就采用新冷光源,选择负性光致抗蚀剂,获得高精度、高反差,低反射黑铬光栅线及有关技术问题等进行了讨论。
In this paper is described a photoetching technolog of the grating rules for multi-function grating measuring instruments by the help of a new cold light source and a kind of home-made resist, resulting in grating lines on the black chromium with high precision and contrast as well as lower reflectance.
出处
《光学仪器》
1989年第1期35-42,共8页
Optical Instruments
