溶胶-凝胶法制备铁电薄膜的研究进展

Latest Progress on Preparation of Ferroelectric Films by Sol-Gel Method

溶胶-凝胶法是制备铁电薄膜的一种重要方法。综述了溶胶-凝胶法制备铁电薄膜的原理、工艺过程、特点,以及采用此方法制备出的某些材料的铁电性能。最后指出,溶胶-凝胶法制备铁电薄膜工艺仍需优化和改进,薄膜的质量亟待提高,以适应器件的要求。

Sol-Gel method is an important method for preparation of ferroelectric thin films.Not only the principle,technology and peculiarities,but also ferroelectric properties of some materials prepared by Sol-Gel were reviewed.In the end,it is pointed out that the process of Sol-Gel should still be optimized and developed and the quality of ferroelectric thin films needed to be improved urgently,so as to adapt the requirement of devices.