摘要
在MPCVD装置中,通过调节微波功率和反应腔压强,使用高分辨率多道光谱仪采集氢气的Hα线.由谱线的多普勒展宽计算得到氢等离子体中的离子温度.结果显示,随着微波功率的增大,离子温度会先升高后降低;随着反应压强的增大,离子温度也先升高后降低.这说明在MPCVD装置中,可以通过调节装置,得到最佳微波能量吸收点.
The Hα line was collected with the multichannel spectrometer by regulating the power of the microwave and the pressure of reactor chamber.Using the Doppler broadening of the spectral lines,the ion temperature of hydrogen plasma was obtained.Both the increase of the microwave power and the pressure caused the ion temperature of hydrogen plasma to rise at first and then drop,which indicated that the best absorption of the microwave energy would be achieved by regulating the device.
出处
《物理实验》
北大核心
2011年第8期1-3,13,共4页
Physics Experimentation
关键词
氢等离子体
微波放电
多普勒展宽
离子温度
hydrogen plasma
microwave discharge
Doppler broadening
ion temperature
