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基于随机Petri网的集束装备模型及马尔可夫链分析 被引量：4

Cluster Tools Model and Markov Chain Analysis Based on Stochastic Petri Nets
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摘要 为了分析集束装备的性能,采用随机Petri网建模方法描述装备串行加工过程.采用自底向上方式,首先建立集束装备各组成模块的基本模型,然后根据实际的加工过程构造出整个装备的随机Petri网模型.给出了模型的马尔可夫链分析过程,进一步推导出装备的吞吐率和加工腔体的利用率.结果表明,该模型不仅可以表现集束装备的并发性,而且能表示出设备操作时间的随机性.该方法能够有效地描述和分析集束装备的加工过程. In order to analyze the performance of cluster tools,stochastic Petri nets approach is used to model the serial production process of cluster tools.With ＂top down＂ methods,the basic models of tool’s modules are developed firstly.Then,according to the actual production process,all the basic models are combined to construct a stochastic Petri nets model of the production system.Markov chain analysis process based on the model is provided.Furthermore,the system throughput and the usage rate of every production chambers are deduced.The result shows that the model not only represents the concurrent activity of cluster tools,but also describes the stochastic occurrence times of all activities.This method can effectively describe and analyze the production process of cluster tools.
作者 郑秀红 胡静涛 于海斌
机构地区 中国科学院沈阳自动化研究所工业信息学重点实验室 中国科学院研究生院 沈阳化工大学计算机科学与技术学院
出处 《信息与控制》 CSCD 北大核心 2011年第4期477-482,共6页 Information and Control
基金 国家科技重大专项课题资助项目(2009ZX02001-005 2009ZX02008-003) 沈阳市科技计划资助项目(108155-2-00)
关键词 随机PETRI网 模型 集束装备 马尔可夫链 吞吐率 stochastic Petri net model cluster tool Markov chain throughput
分类号 TP202 [自动化与计算机技术—检测技术与自动化装置]
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参考文献10

  • 1Poolsup S, Deshpande S. Cluster tool simulation assists the system design[C]//Proceedings of the Winter Simulation Conference. Piscataway, NJ, USA: IEEE, 2000: 1443-1448.
  • 2Lebaron H T, Hendrickson R A. Using emulation to validate a cluster tool simulation model[C]//Proceedings of the Winter Simulation Conference. Piscataway, NJ, USA: IEEE, 2000: 1417-1422.
  • 3Shikalgar S T, Fronckowiak D, Macnalr E A. Application of cluster tool modeling to a 300 mm fab simulation[C]//Proceedings of the Winter Simulation Conference. Piscataway, NJ, USA: IEEE, 2003: 1394-1397.
  • 4Morrison J R, Martin D P. Performance evaluation of photolithography cluster tools[J]. OR Spectrum, 2007, 29(3): 375- 389.
  • 5Srinivasan R S. Modeling and performance analysis of cluster tools using Petri nets[J]. IEEE Transactions on Semiconductor Manufacturing, 1998, 11(3): 394-403.
  • 6Zuberek W M. Timed Petri nets in modeling and analysis of cluster tools[J]. IEEE Transactions on Robotics and Automation, 2001, 17(5): 562-575.
  • 7Zuberek W M. Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets[J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(3): 333-344.
  • 8白丽平,伍乃骐.半导体重入加工过程自动组合装置的建模与分析[J].计算机集成制造系统,2005,11(3):320-325. 被引量：8
  • 9Wu N Q, Zhou M C. Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation[J]. IEEE Transactions on Semiconductor Manufactur- ing, 2010, 23(1): 53-64.
  • 10Mollog M K. Performance analysis using stochastic Petri nets[J]. IEEE Transactions on Computers, 1982, 31(9): 913-917.

二级参考文献12

  • 1茹雨,吴维敏.基于有限容量库所方法的死锁防止算法[J].系统仿真学报,2003,15(z1):59-62. 被引量：3
  • 2BADER M E, HALL R P, STRASSER G. Integrated processing equipment[J]. Solid State Technology, 1990,33(5):149-154.
  • 3BURGGRAAF P. Coping with the high of wafer fabs[J]. Semicond International, 1995,38(3) :45-50.
  • 4KAMATH M. VISWANADHAM N. Application of Petri net based model in the modeling and analysis of flexible manufacturing systems[A]. Proceeding of 1986 IEEE Conference Robotics Automat[C]. New York,NY,USA:IEEE,1986. 312-316.
  • 5ZHOU M, DICESARE F, DESROCHERS A. A hybrid methodology for synthesis of Petri net models for manufacturing systems[J]. IEEE Transactions Robotics and Automation,1992,8(3): 350- 361.
  • 6WU N Q, ZHOU M C. Deadlock avoidance in semiconductor track systems[A]. Proceedings 2002 IEEE International Conference on Robotics and Automation[C]. Washington, WA,USA:IEEE,2002. 193-198.
  • 7LAFTIT S, PROTH J M, XIE X L. Optimization of invariant criteria for event graphs[J]. IEEE Transactions on Automatic Control, 1992,AC-37(5): 547-555.
  • 8PERKINSON T L, MACLARTY P K, GYURCSIK R S, et al. Single- wafer cluster tool performance: an analysis of throughput[J]. IEEE Transactions on Semiconductor Manufacturing, 1994,7(3) :369-373.
  • 9ZHOU M, DICESARE F. A Petri net design method for automated manufacturing systems with shared resources[A].Proceedings of 1990 IEEE Conference Robotics Automat[C].Cincinnati, OH, USA:IEEE,1990. 526-531.
  • 10ZUBEREK W M. Timed Petri nets in modeling and analysis of cluster tools[J]. IEEE Transactions on Robotics and Automation, 2001,17(5): 562- 575.

共引文献7

同被引文献33

  • 1牟小玲,丁晓明,张望.基于Petri网的测试用例生成研究进展[J].重庆交通大学学报（自然科学版）,2012,31(1):163-167. 被引量：4
  • 2张琼,肖金超.第三十五讲 基于工业无线WIA网络的在线测试平台的设计与实现[J].仪器仪表标准化与计量,2012(5):16-20. 被引量：1
  • 3封会娟,于永利,张柳,聂成龙.基于Petri网的作战单元任务可靠性仿真[J].微计算机信息,2006,22(04S):299-301. 被引量：5
  • 4马静,张波,辛波.马尔可夫链在冗余系统可靠度求解中的应用[J].中国惯性技术学报,2007,15(2):248-251. 被引量：11
  • 5娄建武,龙源,谢兴博.废弃火炸药和常规弹药的处置与销毁技术[M].国防工业出版社,2007.
  • 6Marko C, Borut M. A Dynamic Fault Tree [J]. Reliability Engi- neering andSystem Safety,2002,75(1):83-91.
  • 7ZUBEREK W M. Timed Petri nets in modeling and analy- sis of cluster tools [J]. IEEE Transactions on Robotics and Automation, 2001, 17 (5): 562-575.
  • 8ZUBEREK W M. Cluster tools with chamber revisiting- modeling and analysis using timed Petri nets [J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(3): 333-344.
  • 9WU N Q, ZHOU M C. Analysis of wafer sojottrn time in dual-arm cluster tools with residency time constraint and activity time variation [J]. IEEE Transactions on Semi- conductor Manufacturing, 2010, 23 (1): 53-64.
  • 10WOOD S C, TRIPATHI S, MOGHADAM F. A generic model for cluster tool throughput time and capacity [ C ] // Proceedings of IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Cambridge, MA, USA, 1994: 194-199.

引证文献4

二级引证文献6

信息与控制
2011年 第4期

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