光栅线性位移传感器误差分析

Error Analysis on the Grating Transducer of Linear Displacement

本文对光栅线性位移传感器在使用与安装时产生的误差进行了探讨,着重分析了光栅尺变形和尺框变形及误差及压杆结构造成的误差。这对提高传感器的位移测量精度具有实用价值。

The errors caused during the using and the installing of the grating transducers of linear displacement are discussed in this paper. Lay stress on analysing the errors resulted from the deformation of the grating itself and the grating frames, as well as the structures of the pressing poles. The discussion is useful to improve the pricision of the displacement measuring of the transducers.