用于快速、无损检测阳极氧化铝阻挡层厚度的光谱方法

A method for rapid and nondestructive determination of the barrier layer thickness of anodic aluminum oxide

报道一种用于快速、无损检测阳极氧化铝(Anodic Aluminum Oxide,AAO)阻挡层的光谱方法.通过两步阳极氧化法制备了孔径均一,孔道相互平行的纳米孔氧化铝薄膜;用紫外-可见-近红外(UV-VIS-NIR)光谱仪研究了不同阻挡层厚度的样品的透射光谱;结果表明,在可见-近红外光范围内,有阻挡层的纳米孔氧化铝薄膜的透射光谱出现振荡波,而且其波峰(谷)的数目与AAO的阻挡层厚度成线性关系,其线性相关系数为0.99979.这一发现为快速无损检测AAO阻挡层厚度提供了一种简单而高效的方法.

A novel method was established for the rapid and nondestructive determination of the barrier layer thickness of anodic aluminum oxide（AAO） films based on their optical transmission spectra.Nanoporous AAO films with highly ordered pores have been prepared by a two-step anodization approach.Series UV-VIS-NIR transmission spectra of AAO with different barrier layer thickness have been studied.Oscillatory waves were observed at visible-near infrared region in the spectrum of AAO with the existence of barrier layer.Furthermore,a linear relationship between the number of wave crests and the thickness of barrier layer was established,for which the correlation coefficient is 0.99979.This relationship affords a simple and efficient method for rapid and nondestructive detection of the barrier layer thickness of AAO films.