全反射式无焦ZH系统的装调

Optical alignment of all-reflective afocal ZH optical system

介绍了一种新颖的共轴全反射式无焦光学系统—ZH系统的装调技术。该系统由两块相对放置的抛物面反射镜和一块45°放置的双面反射镜组成,其两抛物面反射镜可分别从两端安装,从而使双向平面反射镜易于装配。对ZH系统进行了误差分析和装调分析,讨论了元件位置失调带来的系统像差的变化,给出了ZH系统的误差分析结果。由于光线经过ZH系统和分束镜后,光轴在水平方向和垂直方向有平移,平移后的出射光轴与入射光轴的平行需要精确的装调技术来保证。给出了ZH系统的装调方法,采用可见光平行光管进行辅助装调,采用水平偏移补偿镜和垂直偏移补偿镜对ZH系统出射光轴的偏移量进行补偿,利用测微组件和测微目镜对装调中平晶、反射镜的调节量进行测量,实现了ZH系统出射光轴与入射光轴的同轴。装调完成后,去掉水平偏移补偿镜和垂直偏移补偿镜,实现了ZH系统光轴的空间平行。

A co-axis and all-reflective afocal ZH optical system and its alignment method were introduced.The ZH optical system consists of a first paraboloid,a mirror with two operational faces and a 45° angle and a second paraboloid.The two paraboloids were installed from every end of the mirror,and the mirror with two operational faces was mounted easily.The tolerance and assembly of the ZH optical system were computed and analyzed,the effect of the position misadjustment of the element on the system was discussed,and the error analysis results were given.As there is an offset distance between the incidence optical axis and the shoot optical axis when the light propagates through the ZH system,a precision assembly method was proposed to ensure the parallel of the incidence optical axis and the shoot optical axis.In experiments,a visible collimator tube was used to align the ZH optical system,and the horizontal and vertical parallel offset lenses were taken to compensate the offsets.Moreover,a micro-displacement measuring module and a micrometer eyepiece were used to measure the adjusting size of the system.By the proposed method,the ZH system completes the co-axis of the incidence optical axis and the shoot optical axis.The parallel offset lenses were taken out after ZH optical was assembled,and the system can realize the space parallel of the optical axes.