MFC在单晶炉上控制氩气流量的应用

Application of Mass Flow Controller Controlling Argon Gas Flow in Single Crystal Furnace

目前单晶炉设备全自动控制技术日趋成熟。单晶硅炉拉晶生长过程中,炉体内的真空度稳定性是一个重要的环节。质量流量控制器MFC对于维持单晶炉内真空值起着极其重要的作用。

Automatic control equipment is currently single crystal furnace technology has matured. Growth process of silicon crystal pulling furnace, the furnace body of the vacutm, stability is an important part. Mass Flow Controller MFC values for the maintenance of single-crystal furnace vacuum plays an extremely important role.