超声喷雾热解法制备ZnO:Eu薄膜

Fabrication of ZnO:Eu thin films by ultrasonic spray pyrolysis method

以醋酸锌（Zn（CH3COO）2）、氯化铕（EuCl3）水溶液为前驱体,采用超声喷雾热解（USP）方法在ITO导电玻璃衬底上沉积Eu掺杂ZnO（ZnO：Eu）薄膜。通过扫描电镜（SEM）、X射线衍射（XRD）和光致发光（PL）谱对ZnO：Eu薄膜的形貌、结构和光学性质进行了研究。SEM测试结果表明,超声喷雾热解法制备的ZnO：Eu薄膜为致密的纳米颗粒薄膜,ZnO：Eu晶粒尺寸约在200~250 nm。XRD图谱表明,ZnO：Eu薄膜具有很好的六角纤锌矿结构,且在2θ=47.28°处出现Eu2O3的衍射峰。激发光谱表明,ZnO：Eu薄膜在280、373和393 nm处有较强的紫外吸收。PL谱表明,当用280 nm激发光激发时,ZnO：Eu薄膜在613 nm处具有较强的红光发射。

Using zinc acetate and europium chloride solution as precursor.ZnO：Eu thin films were deposited on the ITO glass substrate by the ultrasonic spray pyrolysis（USP） method.The morphologies,crystal strustures and optical properties were investigated by using scanning electro microscopy（SEM）,X-ray diffraction（XRD） and photoluminescence（PL）.The SEM results indicate that the USP method can obtain compact and uniform ZnO：Eu thin films with nanocrystal diameters about 200-250 nm.The XRD patterns reveal that ZnO：Eu films have better hexagonal wurtzite structure,and the characteristic diffraction peak of Eu2O3 appears at 2θ=47.27°.Excitation spectra show that ZnO：Eu films have intensive absorption at 280 nm and 373 nm,393 nm.PL spectra show that when excited with 280 nm,there is a strong purple emission peak at 613 nm.