基于ARM的直线式时栅传感器自动闭环控制系统设计

Design of an automatic close-loop control system of linear time grating sensor based on ARM

设计的自动闭环控制系统,是为了完成直线式时栅传感器数据的快速采样,提高测试效率。基于PHILIPS公司的ARM处理器LPC2214作为主控芯片,设计了控制电路,控制步进电动机驱动滚珠丝杠,带动直线式时栅传感器的动测头与直线光栅的扫描头同步运动,同时接收直线式时栅传感器的反馈信号,并与上位机之间进行串口通信。实践证明:系统响应速度快,控制精度能达到0.1μm。

An automatic closed-loop control system is designed in order to finish linear time grating sensor of data sample and improve measure work efficiency. The PHILIPS LPC2214 ARM processor was used as a major controlling chip. The controlling circuit is designed, which controls step motor to drive the ball screw, makes the dynamic measurement head of linear time grating sensor move with scanning head of grating, while receiving the feedback signal from linear time grating sensor, and communicating with upper computer by serial port. Practice has proved that： the system responds fast, and accuracy can reach 0.1 μm.