基于腔衰荡光谱技术的光纤微腔温度传感器

Temperature Sensor of Fiber Micro-Cavity Based on Cavity Ring-Down Spectroscopy Technology

提出并实现了一种基于腔衰荡光谱（CRDS）技术的光纤微腔温度传感器。利用高频CO2激光脉冲技术在1060nm单模光纤上直接刻蚀光学微腔，将其作为传感单元接人到光纤环谐振腔中，通过测量脉冲激光衰荡时间实现了温度传感。在24℃～93℃温度范围内，光纤微腔温度传感器灵敏度达到83．36ns／℃，实验测量结果具有良好的线性度。

A temperature sensor of fiber micro-cavity based on the cavity ring-down spectroscopy （CRDS） technology is proposed and implemented. The micro-cavity on single mode 1060 nm fibers is achieved by direct writing with high-frequency CO2 laser pulses. As a sensor unit, the fiber micro-cavity is accessed to the fiber-loop resonator. Temperature sensing is realized by measuring the ring-down time of the pulsed laser. In the temperature range of 24 ℃-93℃ , the sensitivity of the temperature sensor is up to 83.36 ns/℃. Experimental results show good linearity.