摘要
信息技术已经进入纳米时代,纳米光学和光子学正是为满足快速和高密度信息技术的需求而产生、发展的。先进的纳米光学和光子学器件应该是高速、高分辨率和高集成的,形成各类光学和光子学芯片和盘片。由于器件最小特征尺寸和加工分辨率受限于光的衍射极限,现有技术已接近实用化技术的理论极限并且成本很高,只有突破光学衍射极限才能进一步发展纳米光学和光子学。在光的远场和近场应用超分辨率技术,是当前重要的前沿课题,它们的应用主要集中于信息技术领域,具有代表性的是纳米信息存储和光刻中的光学超分辨率技术等。
Information technology has entered into the nanometer scale era.Nano-optics and photonics are generated and developed to meet the demands of fast and high density information technology.Advanced nano-optical and photonic devices should be of high speed,high resolution and high integration,forming various types of optical and photonic chips and disks.Because the minimum feature size and processing resolution of optical devices are limited by the diffraction limit,the existing technologies have been approaching to the theoretical limit and the cost is very high.Only breaking through the diffraction limit can further develop nano-optics and photonics.Achieving super-resolution in the far and near optical fields is one of the important academic topics,and its application is mainly focused on the optical super-resolution technologies for the nano information storage and lithography applications.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第9期49-57,共9页
Acta Optica Sinica
基金
国家自然科学基金(11054001)资助课题
关键词
纳米光学
纳米光子学
超分辨率
光信息存储
光刻
nano-optics
nano-photonics
super-resolution
optical data storage
photolithography