摘要
利用ICP体硅深加工,本文设计分析了一种三轴三质量块的电容式加速度传感器。水平方向采用定齿偏置配置梳齿式,垂直方向采用不等高对称梳齿式;对称的布局方式,解决了各个轴向的相互干扰问题。利用有限元分析工具对设计进行模拟,证实了设计的合理性和可行性。X、Y轴向和Z轴向的灵敏度分别为1.2 fF/g和1.0 fF/g,量程为±50 g。
Based on deep ICP process,a three-axis with three masses capacitive acceleration sensor has been de-signed.The bias stationary combs structure are used for measuring the horizontal acceleration,while the different height combs are used in vertical direction,and the problem of mutual interference of each axis has been solved by symmetrical layout.The designed structure is simulated by finite element analysis tool Ansys.the measured sensitivities of x-,y-,and z-axis accelerometers are 1.2 fF/g,1.2 fF/g and 1.0 fF/g,respectively,the measurement range is ± 50g.
出处
《电子测量与仪器学报》
CSCD
2011年第8期704-710,共7页
Journal of Electronic Measurement and Instrumentation
基金
安徽省科技攻关计划项目(编号:10120106005)资助项目
中央高校基本科研业务费(编号:2010HGZY0004)资助项目
安徽省自然科学基金(编号:090414199)资助项目
关键词
电容式加速度传感器
三轴
不等高梳齿
MEMS
Capacitive acceleration sensor
tri-aixs accelerometer
different height combs
MEMS