不等高梳齿电容式三轴MEMS加速度传感器

Tri-Aixs capacitive acceleration sensor with different height combs

利用ICP体硅深加工,本文设计分析了一种三轴三质量块的电容式加速度传感器。水平方向采用定齿偏置配置梳齿式,垂直方向采用不等高对称梳齿式;对称的布局方式,解决了各个轴向的相互干扰问题。利用有限元分析工具对设计进行模拟,证实了设计的合理性和可行性。X、Y轴向和Z轴向的灵敏度分别为1.2 fF/g和1.0 fF/g,量程为±50 g。

Based on deep ICP process,a three-axis with three masses capacitive acceleration sensor has been de-signed.The bias stationary combs structure are used for measuring the horizontal acceleration,while the different height combs are used in vertical direction,and the problem of mutual interference of each axis has been solved by symmetrical layout.The designed structure is simulated by finite element analysis tool Ansys.the measured sensitivities of x-,y-,and z-axis accelerometers are 1.2 fF/g,1.2 fF/g and 1.0 fF/g,respectively,the measurement range is ± 50g.