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基于LabVIEW晶体生长检测系统的圆弧拟合技术 被引量:1

Arc Fitting Technology for Crystalloids Growth Detection System Based on LabVIEW
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摘要 在基于LabVIEW晶体生长检测系统中,基于最小二乘法曲线拟合原理和单晶硅生长特性,运用图形化编程语言对采集的单晶硅生长信息图进行图像处理,对部分"释热光环"进行圆弧拟合,由拟合出的圆进行晶体生长直径检测。实验表明,该设计能够很好地完成圆弧拟合,实现对单晶硅的生长直径检测,符合系统检测要求。 In the crystalloids growth detecting system based on LabVIEW,according to the growth features of monocrystalline silicon and the principle of least square method fictions,the image processing is done on collected monocrystalline silicon growth information by adopting graphic programming languages,during which spline curve fitting is applied to some of the "ptroelectric rings".Therefore,the diameter of the crystalloids growth is able to be detected via the Arc fit.This experiment exhibits that such a rigorous design is capable of the spline curve fitting function,and can detect the diameter of the crystalliods growth of monocrystalline silicon,and thus meeting all requirements of detecting system.
作者 白雨 程光伟
出处 《电子科技》 2011年第9期91-93,共3页 Electronic Science and Technology
关键词 LABVIEW 最小二乘法 圆弧拟合 LabVIEW least square method arc fit
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