摘要
A new removal optimization method called submerged jet polishing （SJP） is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic （PV） 0.066 λ to 0.024 ）, （λ = 632.8 nm） after three iterations, and the root mean square （RMS） value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
A new removal optimization method called submerged jet polishing （SJP） is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic （PV） 0.066 λ to 0.024 ）, （λ = 632.8 nm） after three iterations, and the root mean square （RMS） value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
基金
supported by the National Natural Science Foundation of China under Grant No. 60808017
