透明导电氧化物薄膜的制备方法研究

Methods of preparation for thin film of transparent conductive oxide

主要介绍了制备透明导电氧化物薄膜的方法,其中包括磁控溅射法、脉冲激光沉积法(PLD)、喷涂热解法、分子束外延法(MBE)、溶胶-凝胶技术(sol-gel)法,总结了各种方法的优缺点,并对透明导电氧化物薄膜的研究进行了展望。

Various methods are introduced of preparation for thin film of transparent conductive oxide, including Magnetron Spluttering, Pulsed Laser Deposition （PLD）, Spray Pyrolysis, Molecular Beam Extension （MBE） and Sol -gel Technique, and their advantages and disadvantages are summed up. The prospect is described for the research of thin film of transparent conductive oxide.