摘要
主要介绍了制备透明导电氧化物薄膜的方法,其中包括磁控溅射法、脉冲激光沉积法(PLD)、喷涂热解法、分子束外延法(MBE)、溶胶-凝胶技术(sol-gel)法,总结了各种方法的优缺点,并对透明导电氧化物薄膜的研究进行了展望。
Various methods are introduced of preparation for thin film of transparent conductive oxide, including Magnetron Spluttering, Pulsed Laser Deposition (PLD), Spray Pyrolysis, Molecular Beam Extension (MBE) and Sol -gel Technique, and their advantages and disadvantages are summed up. The prospect is described for the research of thin film of transparent conductive oxide.
出处
《渤海大学学报(自然科学版)》
CAS
2011年第3期241-244,共4页
Journal of Bohai University:Natural Science Edition
基金
辽宁省科技厅重点实验室资助项目(No:2008403001)
关键词
透明导电氧化物薄膜
制备方法
展望
thin film of transparent conductive oxide
methods of preparation
prospect